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Dr. Satyendra Kumar Mourya

Assistant Professor, Department of Electrical & Electronics Engineering, BITS Pilani, Pilani Campus

Semiconductor materials and devices, Nanoelectronics, VLSI technology, SiC based electron devices, Solid state gas sensors, Optoelectronics, Thin films fabrication using PVD, Electrochromic devices
Room No :-2146-D, Faculty Division-II,
Department of Electrical and Electronics Engineering,
Birla Institute of Technology & Science, Pilani- 333031, Rajasthan. India.

  

Research Interest

  • VLSI Technology: Fabrication of SiC based MSM structure, Schottky diodes, and resistive devices for extreme environment applications. Study of charge transport properties at metal-semiconductor interface. Electrochemical anodization of Si and SiC wafers for the development of high performance solid state gas sensing technology. Synthesis and characterization of multiple thickness gate oxides for SOC system, High-k gate dielectric stacks charge trapping for CMOS Technology.
  • Nano Science and Nanotechnology: Growth of crystalline metallic and semiconducting thin films (Ti, SiC, ZnO, and TiO2) by DC/RF magnetron sputtering for diverse optoelectronic applications. Catalytic activation of metal and semiconducting thin films for hydrogen gas sensing application. Growth of metal oxide thin films for electrochromic applications.

Ph.D. Supervision

Full - Time :
 
1. Ananya Garg
  • Research Area: Wide & Ultra - Wide bandgap materials based Optoelectronic devices & Sensors.
2. Shivangi Kaushik
  • Research Area: Simulation, Fabrication & Reliability study of energy storage devices.